Si3N4 Sputtering Targets

Si3N4 Sputtering Targets

Goodwill Metal Tech manufactures Si3N4 Sputtering Targets. Our product is consistently good in quality and purity. We also makes doped targets by customer request.

Product Details


preferred name:Silicon nitride
Other names: Nierite 
CAS Number:12033-89-5 
ECHA InfoCard:100.031.620
EC Number:234-796-8
PubChem CID:3084099
Chemical formula:Si3N4
Molar mass:140.28 g·mol−1

Appearance:grey, odorless powder

Density:3.2 g/cm3, solid

Melting point:1,900 °C; 3,452 °F; 2,173 K (decomposes)
Solubility in water:Insoluble 
Refractive index (nD):2.016

Main hazards:When heated to decomposition, silicon nitride may emit toxic fumes of ammonia and ozone. Contact with acids may generate flammable hydrogen gas.


Silicon Nitride Sputtering Target (Si3N4 Target)

Purity --- >99%, >99.9%

Shape --- Discs, Plate, Step (Dia ≤300mm,, Thickness ≥2mm)

Rectangle, Sheet, Step (Length ≤300mm, Width ≤300mm, Thickness ≥2mm) 


Silicon Nitride Nanometer Powder (Amorphous Si3N4) 

Purity---99.0% Oxygen content --- <0.62wt% Dissociative Si (%)---< 0.3%

Color --- white Crystal Phase --- Amorphous 

Average particle size (D50) --- <20nm

Specific surface area --- >115m2/g

Loose loading density --- 0.05g/cm3 

Manufacture method --- Plasma arc vapor 


Silicon Nitride Nanometer Powder ( Alpha Si3N4 ) 

Purity---99.1% Oxygen content --- <0.9wt% 

Color --- shallow brown Crystal Phase --- Hexagonal 

Average particle size (D50) --- <100-800nm

Specific surface area --- >45m2/g

Loose loading density --- 0.44g/cm3 

Manufacture method --- Plasma arc vapor 

Application --- This product has high purity, small and uniform particle diameters, large specific surface area, high surface activity, and low loose loading density. When Nano-Si3N4 is made to be structure devices, the devices will have low ceramic formation temperature of ceramic, good size stability, high mechanical strength, high chemical anticorrosion, especially, the devices possess high strength, at high temperature and the self greasing effect, when this powder is used as the dispersion phase in composites, these dispersion phases increase substantially complex properties of composites.

Goodwill Can Customize Various Kinds Of Ceramic Sputtering Targets According To Customer's Requirement, Size Ratio Can Be Customized, Welcome To Consult.

Packaging & Shipping
Vacuum Packing .Cartons Packing .Wooden Case Packing .Standard Export Packing
Carrier :DHL,UPS,TNT,FedEx

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