Si Sputtering Target

Si Sputtering Target

Goodwill Metal Tech manufactures Si Sputtering Target Si. Our product is consistently good in quality and purity. We also makes doped targets by customer request.

Product Details

Basic Information

Atomic Number:14
Atomic Mass:28.0855 amu
Melting Point:1410.0 °C (1683.15 °K, 2570.0 °F)
Boiling Point:2355.0 °C (2628.15 °K, 4271.0 °F)

Number of Protons/Electrons:14
Number of Neutrons:14
Crystal Structure:Cubic
Density @ 293 K:2.329 g/cm3

Silicon Sputtering Targets (Si Target)

Purity---99.999% (N type, P type)Shape--- Discs, Plate, Step (Dia≤305mm,,Thickness≥1mm)

Rectangle, Sheet, Step (Length≤600mm,Width≤305mm,Thickness≥1mm)

Tube(Diameter< 305mm,Thickness>4mm, Silicon rotary target )

Application--- Mechanical and chemical resistant coating. Interference filter, Solar cell...

Silicon (Si) Evaporation Material

Purity---99.999%Density---2.33 g/cm3

Shape---Irregular pieces, pellet, solid substance,Black granulars or lumps.

Dimension---3-8mm irregular pieces (or custom-made)
Solubility---Insoluble in water and soluble in mixture of HF and HNO3.

Melting point---1410 ℃,

Boiling point ---2480 ℃, Vapour pressure at 1343 ℃ 1 Pa,at 1585℃ 10 Pa

Expand coefficient--- 2.33× 10-6
Specific heat capacity--- 0.181 Cal/gK
Thermal conductitivity---0.373 Cal/
Hardness--- acc. to Knoop 1150±110 Kg/mm2, Mohs 7
Properties of thin film
Transmission range ~ 1100~20000nm
Refractive index at 1500nm 3.48,at 2000nm 3.46,at 5000nm 3.42,at10000nm 3.42
Hints on evaporation---
Evaporation in ZrO2 or C crucible with electron beam gun.
Evaporation temperature~ 1500 ℃
Substrate temperature~ 300 ℃
Applications---Anti-reflection coatings, interference filters, jewel, solar cell etc

Silicon (Si) Substrate


Shape--- Discs, Plate, Step (Dia≤305mm,,Thickness≥1mm)

Rectangle, Sheet, Step (Length≤1000mm,Width≤305mm,Thickness≥1mm)

Tube(Diameter< 305mm,Thickness>2mm, )Surface---Polish one side & Polish both side

Silicon (Si) Rod



Silicon (Si) Powder


Silicon (Si) Boat and Si Profiletracer


Shape--- Tube boat , Sealed tube boat, flat plate boat, base drawing

Dimension--- custom-made

Application ---Primary used manufacture semiconductor's diffuse, oxide technics and semiconductor products

Packaging & Shipping
Vacuum Packing .Cartons Packing .Wooden Case Packing .Standard Export Packing
Carrier :DHL,UPS,TNT,FedEx

Company Information
Goodwill Metal is belonged to China's the biggest material research institute-General Research Institute For NONFERROUS Metals.
We rigorous,efficient,and customer oriented.
We provide best products to the industrial for years.Also, we provide customized materials to laboratories and research institutes for their academic achievement.

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